Ultrapure Gas Filtration
2026-05-31Traffic：
Ultra-high purity gas (UHP Gas) refers to gases with extremely high purity and extremely low impurity content, typically used in cutting-edge industrial fields with extremely strict requirements for gas quality. Generally, gases with a purity higher than 99.99% are considered high-purity gases, while ultra-high purity gases require a purity of 99.9999% (6N) or higher, with some special applications demanding even higher levels. In core industries such as semiconductor manufacturing, the number of particles larger than 0.5μm per liter of gas must be less than three, and the total impurity content must be controlled at the ppm (one part per million) or even ppb (one part per billion) level.
Ultra-pure gas filtration is a critical step in ensuring gas purity. Its core purpose is to deeply remove minute particles, moisture, oil contamination, microorganisms, and harmful chemical substances present in the gas through multiple mechanisms such as physical interception, adsorption, and chemical reactions, thereby ensuring the gas meets the standards of specific production processes.
